Full-auto, wet bench, semiconductor, wafer, wet processing

Evolution Wet Processing System

High-throughput, Dry-to-Dry, Full-auto Wet Bench

The Evolution Wet Processing System is a full-auto linear wet bench. With its modular design is highly configurable and able to accommodate any specified process sequence, in fact, multiple sequences. As a batch immersion wet process system, the Evolution main feature is high yield, while maintaining a low cost of operation. The full-auto design features dry-to-dry processing with multiple, simultaneous lot batch processing capabilities for wafer sizes ranging from 100mm to 300mm, within its own controlled environment. Running under IDX Flexware control, the Evolution is one of the most advanced wet processing systems in the industry. With unique, advanced features and capabilities, including Lot Scheduling via the "Scheduler", FlexView(optional), Active Queue, multi-step processing, specialized process tanks, Ultrasonic and Megasonic tanks, cascade or quick dump rinsing, chemical injection and spiking, multiple drying options to include MEI's Genesis X Marangoni drying, and a robust, reliable transfer robot. As with all MEI systems, SECS/GEM compliant factory host capabilities are available. The Evolution is custom tailored to meet your specific process requirements. It's time to evolve with MEI's Full-auto Wet Processing System, The Evolution.


Applications

MEI Evolution Wet Bench Applications
  • FEoL Clean
  • BEoL Clean
  • Au, Al, Ti, & Cu
  • Prediffusion Clean
  • KOH
  • Gate Clean
  • Cobalt Salicide
  • HF Last
  • Post CMP Clean
  • Nitride ONO
  • Solvent Resist Strip
  • Side Wall Polymer Clean
  • Wafer Reclaim
  • PreEpi Clean
  • Strain Relief Etch

Benefits

MEI Evolution Wet Bench Applications
  • Low MTTR
  • Mean Time Between Failures >1500 hrs.
  • Increased Uptime & Throughput
  • Extended Chemistry & Tank Life
  • IDX Scheduler Maximizes System Throughput
  • Lower Facility Costs
  • Reduced Chemical & DI Water Usage
  • Reduced Setup Time
  • OEM Parts Availability
  • Award-winning Service & Support
  • Maintenance-friendly

DOWNLOAD THE
EVOLUTION WET BENCH BROCHURE

Technology

MEI Evolution Wet Bench Applications

IDX Flexware
Advanced Process Control

MEI's proprietary IDX Flexware Process Control software provides complete control of all critical processes and conditions through closed-loop monitoring and feedback. IDX Flexware provides advanced capabilities, features, and options that are required for advanced process applications and solutions.

IDX FLEXWARE
PROCESS CONTROL SOFTWARE

FlexView Advanced Process Monitoring

MEI's Flexview software enables equipment and process engineers to review the processing conditions of a specific lot ID at a glance. FlexView software does this by providing a graphic representation of all existing monitored conditions & tolerances, then storing that data in a file that is specific to the Lot ID that was being processed at that time. In the event of a yield-loss on a particular lot, the process engineer can quickly identify if the wet station processed that lot within the required specifications. In this way, the system can be much more easily eliminated as a possible cause of the yield loss even. FlexView eliminates the need to interpret large amounts of data in the data log. This creates the opportunity for greater system optimization and process transparency while improving the overall operator experience.

IDX FLEXVIEW
PROCESS MONITORING


Evolution Wet Processing System Options

MEI's Evolution is available with a variety of options. Configurations of the Evolution Wet Bench are endless from multiple loading method options, heating & chilling, lids, fill methods and upgraded features.

MEI Evolution Wet Processing Wet Bench Option
MEI Evolution Wet Processing Wet Bench Option
MEI Evolution Wet Processing Wet Bench Option
  • 150mm, 200mm wafers
  • SMIF and “open cassette” input options
  • Class 1 Environment
  • Ballroom and Bulkhead mounting
  • Heater, chiller, dryer options
  • Spiking, reclaim, lid, overflow weir, re-circulation
  • Filter, fill method, agitation, flush and drain options
  • Megasonic or ultrasonic baths
  • Chemical spiking, re-circulation, and filtration
  • Heater (including solid state), chiller and dryer options
  • Wafer carrier and queue pass-on cassette options
  • HEPA filters to create a positive pressure environment
  • SECS/GEM Interface Options
  • Automatic bulk chemical system integration
  • Integrated chemical spiking
  • Automatic or manual doors
  • Choice of materials, FM4910 (Halar, CPVC, PVDF) or polypropylene or stainless steel
  • SEMI S2-0703 3rd party evaluation audits and FM certified systems
  • UL Listed 508A Panel Shop

MEI's Wet Bench Platforms are:

  • Flexible and Upgradeable
  • Easy to Use and Well Controlled
  • Tailored to Customer Spec
  • Production Ready
  • UL Listed 508A
  • User-friendly and Intuitive
  • Designed for Safety
  • Maintenance Friendly
  • Robust & Reliable
  • Award-winning Support

EVOLUTION WET BENCH BROCHURE