MEI Wet Processing System Advancer Micro Wet Bench

Advancer Micro Wet Processing System

Narrow Wet Bench, Semi-Auto Single-step

MEI's Advancer Micro Wet Bench offers many of the same features and capabilities of the Advancer Classic Wet Bench but in a more compact design. The Advancer Micro has a lower overall expense with minimal facility connections. The  Advancer Micro's incredibly narrow 24" wide footprint is a popular space-efficient alternative. The Advancer Micro delivers an increase in processing capacity for a relatively low cost.  The Advancer platform offers many advanced wet processing features monitored entirely by IDX Flexware. The Advancer Micro Wet Bench provides the best-wet processing solution for those with limited production space.


Applications

Advancer Micro Wet Processing Wet Bench
  • CMP Clean
  • Pre-diffusion Clean
  • Multiple Oxide Etch
  • Solvent Strip
  • Developer
  • Sulfuric Resist Strip
  • Nitride Etch

Benefits

MEI Advancer Micro Wet Bench Applications
    li>Minimal Footprint Requirements
  • Minimal Facility Requirements
  • Improved Process Control
  • Low Cost of Ownership
  • Reduced DI Water Usage
  • Reduced Chemistry Usage
  • Maintenance Friendly
  • Award-winning Support
  • Part Availability

DOWNLOAD THE
ADVANCED MICRO WET BENCH BROCHURE

Technology

MEI Advancer Micro Wet Bench IDX Flexware Software

IDX Flexware
Advanced Process Control

MEI's proprietary IDX Flexware Process Control software provides complete control of all critical processes and conditions through closed-loop monitoring and feedback. IDX Flexware provides advanced capabilities, features, and options that are required for advanced process applications and solutions.

IDX FLEXWARE
PROCESS CONTROL SOFTWARE

FlexView Advanced Process Monitoring

MEI's Flexview software enables equipment and process engineers to review the processing conditions of a specific lot ID at a glance. FlexView software does this by providing a graphic representation of all existing monitored conditions & tolerances, then storing that data in a file that is specific to the Lot ID that was being processed at that time. In the event of a yield-loss on a particular lot, the process engineer can quickly identify if the wet station processed that lot within the required specifications. In this way, the system can be much more easily eliminated as a possible cause of the yield loss even. FlexView eliminates the need to interpret large amounts of data in the data log. This creates the opportunity for greater system optimization and process transparency while improving the overall operator experience.

IDX FLEXVIEW
PROCESS MONITORING


Advancer Micro Wet Processing System Options

  • Custom Process Tanks, including Megasonics & Ultrasonics
  • Heating / Chilling
  • Spiking, Reclaim, & Re-circulation
  • Resistivity & Conductivity Monitoring
  • Filtration, Filling Methods, Agitation, Flush & Drain
  • Bulk Chemical Supply Integration
  • Choice of Shell Materials
  • SEMI S2-0703 3rd party Evaluation
  • FlexView (sold as an option under IDX Flexware)
  • USB Back-Up (sold as an option under IDX Flexware)

MEI Wet Bench Platforms are:

  • Flexible and Upgradeable
  • Easy to Use and Well Controlled
  • Tailored to Customer Spec
  • Production Ready
  • UL Listed 508A
  • User-friendly and Intuitive
  • Designed for Safety
  • Maintenance Friendly
  • Robust & Reliable
  • Award-winning Support

ADVANCER MICRO WET BENCH BROCHURE