Visit us at SEMICON EUROPA • Booth 1006 • November 11-16 in Munich, Germany

MEI MultiChem Chemical Delivery System

MultiChem Chemical Delivery 

Local Carboy Chemical Delivery

MEI's MultiChem Chemical Delivery System provides chemical delivery capabilities for processes with lower demands while providing recapture (reclaim) capabilities via the use of five-gallon chemical carboys. Only the highest quality plumbing components are used throughout MEI chemical delivery systems. All metal components are either chemical resistance, epoxy powder coated or anodized for longevity. All electronics compartments are isolated and nitrogen purged. Carboy level detection utilizes highly accurate load cells for reliable liquid levels. The MultiChem is field-proven, reliable system that you can count on. With the use of the ChemControl Cell controller MEI chemical delivery systems can scale as your process demands increase.


Applications

  • Acids
  • Bases
  • Solvents

Benefits

MEI MultiChem Chemical Delivery System Benefits

  • Custom tailored to your process needs
  • Ergonomic Design
  • Seamless Integration with Wet Process System
  • Field proven design and safety features
  • Highest quality plumbing components
  • Chemical resistant Metal Components

DOWNLOAD THE
MULTICHEM CHEMICAL DELIVERY BROCHURE

Technology

MEI MultiChem Chemical Delivery System Software

IDX Flexware
Advanced Process Control

MEI's proprietary IDX Flexware Process Control software provides complete control of all critical processes and conditions through closed-loop monitoring and feedback. IDX Flexware provides advanced capabilities, features, and options that are required for advanced process applications and solutions.

IDX FLEXWARE
PROCESS CONTROL SOFTWARE

FlexView Advanced Process Monitoring

MEI's Flexview software enables equipment and process engineers to review the processing conditions of a specific lot ID at a glance. FlexView software does this by providing a graphic representation of all existing monitored conditions & tolerances, then storing that data in a file that is specific to the Lot ID that was being processed at that time. In the event of a yield-loss on a particular lot, the process engineer can quickly identify if the wet station processed that lot within the required specifications. In this way, the system can be much more easily eliminated as a possible cause of the yield loss even. FlexView eliminates the need to interpret large amounts of data in the data log. This creates the opportunity for greater system optimization and process transparency while improving the overall operator experience.

IDX FLEXVIEW
PROCESS MONITORING


MultiChem Chemical Delivery Options

  • Recapture capabilities
  • Filtration and Recirculation
  • Kiosk control for Multiple Systems
  • Remote EMO Shut Down
  • Valve Manifold Boxes
  • Valve Manifold Boxes
  • Choice of materials: FM4910 (Halar, CPVC, PVDF) or Polypropylene or Stainless Steel

MEI Chemical Delivery Platforms are:

  • Flexible and Upgradeable
  • Easy to Use and Well Controlled
  • Tailored to Customer Spec
  • Production Ready
  • UL Listed 508A
  • User-friendly and Intuitive
  • Designed for Safety
  • Maintenance Friendly
  • Robust & Reliable
  • Award-winning Support

MULTICHEM CHEMICAL DELIVERY BROCHURE