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MEI's MultiChem Chemical Delivery System provides chemical delivery capabilities for processes with lower demands while providing recapture (reclaim) capabilities via the use of five-gallon chemical carboys. Only the highest quality plumbing components are used throughout MEI chemical delivery systems. All metal components are either chemical resistance, epoxy powder coated or anodized for longevity. All electronics compartments are isolated and nitrogen purged. Carboy level detection utilizes highly accurate load cells for reliable liquid levels. The MultiChem is field-proven, reliable system that you can count on. With the use of the ChemControl Cell controller MEI chemical delivery systems can scale as your process demands increase.
MEI's proprietary IDX Flexware Process Control software provides complete control of all critical processes and conditions through closed-loop monitoring and feedback. IDX Flexware provides advanced capabilities, features, and options that are required for advanced process applications and solutions.
MEI's Flexview software enables equipment and process engineers to review the processing conditions of a specific lot ID at a glance. FlexView software does this by providing a graphic representation of all existing monitored conditions & tolerances, then storing that data in a file that is specific to the Lot ID that was being processed at that time. In the event of a yield-loss on a particular lot, the process engineer can quickly identify if the wet station processed that lot within the required specifications. In this way, the system can be much more easily eliminated as a possible cause of the yield loss even. FlexView eliminates the need to interpret large amounts of data in the data log. This creates the opportunity for greater system optimization and process transparency while improving the overall operator experience.