MEI DrumChem Chemical Delivery System

DrumChem Chemical Delivery 

Localized Bulk Chemical Delivery

MEI's DrumChem Chemical Delivery System is a self-contained bulk chemical delivery system featuring a multi-modular design, providing recapture with on-demand control and feedback. Multiple DrumChem systems can operate from a single remote ChemControl kiosk or individually as a standalone system utilizing a dedicated controller. An optional 5-gallon reserve/day tank provides the opportunity for continuous chemical dosing during drum changes.

The DrumChem is a pressurized chemical delivery system. The DrumChem is designed to allow front and side access to all major serviceable components. The DrumChem can be configured as a single drum or dual drum system that provide delivery for acid, base, or solvent delivery applications. The DrumChem is a scalable system that can expand with your process demands.


  • Acids
  • Bases
  • Solvents


  • Custom tailored to your process needs
  • Ergonomic Design
  • Seamless Integration with Wet Process System
  • Field proven design and safety features
  • Highest quality plumbing components
  • Chemical resistant Metal Components
  • Conforms to SEMI-S2 standard



MEI DrumChem Chemical Delivery System Software

IDX Flexware
Advanced Process Control

MEI's proprietary IDX Flexware Process Control software provides complete control of all critical processes and conditions through closed-loop monitoring and feedback. IDX Flexware provides advanced capabilities, features, and options that are required for advanced process applications and solutions.


FlexView Advanced Process Monitoring

MEI's Flexview software enables equipment and process engineers to review the processing conditions of a specific lot ID at a glance. FlexView software does this by providing a graphic representation of all existing monitored conditions & tolerances, then storing that data in a file that is specific to the Lot ID that was being processed at that time. In the event of a yield-loss on a particular lot, the process engineer can quickly identify if the wet station processed that lot within the required specifications. In this way, the system can be much more easily eliminated as a possible cause of the yield loss even. FlexView eliminates the need to interpret large amounts of data in the data log. This creates the opportunity for greater system optimization and process transparency while improving the overall operator experience.


DrumChem Chemical Delivery Options

  • Available in Dual or Single Drum
  • Available in Left or Right-Hand Doors
  • Filtration and Recirculation
  • Kiosk control for Multiple Systems
  • Remote EMO Shut Down
  • Valve Manifold Boxes
  • Choice of materials:
    FM4910 (Halar, CPVC, PVDF) or Polypropylene or Stainless Steel.

MEI Chemical Delivery Platforms are:

  • Flexible and Upgradeable
  • Easy to Use and Well Controlled
  • Tailored to Customer Spec
  • Production Ready
  • UL Listed 508A
  • User-friendly and Intuitive
  • Designed for Safety
  • Maintenance Friendly
  • Robust & Reliable
  • Award-winning Support