Home | About Us | News | Contact Us  
   
 
 
 
   
 
     
1-877-858-3270 Request Free Quote

Wet Processing Systems

Tailored Wet Processing Systems, Wet Stations, Wet Benches and Fume Hoods

Semiconductor Processing Equipment

MEI’s batch wet process systems, wet stations and wet benches are designed for silicon etch, wafer cleaning, and wafer stripping for wafers from 100 mm up to 300 mm, and include fully automatic, semi-automatic and manual options, with a choice of linear and rotary robotics. MEI has a solution to meet most wet etching, wet process, parts cleaning and wafer cleaning needs.

All of MEI’s wet benches and wet processing equipment are:

Flexible and Upgradeable
Modular designs, professionally CAD drawn.

Easy to Use and Well Controlled
MEI IDX Automation software provides easy to use, flexible and configurable controls. MEI designs and manufactures all of its own robotics.

Tailored
All systems are tailored from one of our flexible platforms to your process and fab design, via MEI’s unique partnership design process.

Production Ready
Quality and safety are designed and built right in. We focus on equipment footprint, high throughput and low cost of ownership to meet your process needs. Software is SECS/GEM compliant to provide seamless fab integration.

Designed for Safety
Proprietary MEI design elements ensure safety, proper ergonomics, ease of maintenance, and high reliability.

Maintenance Friendly
Up-time is everything. Thoughtful design provides easy access to all component areas, and MEI uses OEM, not custom components so spares and replacements are readily obtainable.

Reliable
Field proven reliability developed over twenty plus years of experience. Each MEI system is tailored and designed using Solid Works with detailed drawings that ensure quality, precision and accurate documentation.

Supported
MEI provides world-class, award winning service, installation and support.

MEI’s Wet Processing Systems

A full line of tools to meet your needs

MEI’s wet processing systems provide you with affordable, high-quality semiconductor and batch immersion process tools that perform safely and reliably. Explore our modular systems by platform:

Evolution

Revolution

Evolution Revolution

o   Automated
o   Multi-step
o   In-line transfer
      mechanism
o   Solar option

o   Automated
o   Multi-step
o   Rotary transfer
      mechanism

Advancer

Achiever

Advancer Achiever

o   Semi-Automated
o   Single-step
o   Modular-Linear
o   Small footprint

o   Manual stations
     and wet benches
o   Fume Hoods and
o   Parts Cleaning

Each system is designed and tailored to meet your process needs.

MEI wet benches and wet processing systems are installed in major semiconductor, medical and solar fabs across the industry, worldwide.

 

Call us:  1-877-858-3270
 Send Request

 

Solar Wafer Processing, Medical Device Production, Parts Cleaning and Other Applications

In addition to semiconductor wafer processing, we build custom wet process systems for use in medical parts and devices cleaning, MEMS, BioPharma production, life sciences research, solar cell production, parts cleaning and other application industries. Solar applications can include glass etch and damage removal etch.

Sample Process Applications:

Etching: Oxide, Nitride, Silicon Etch

Stripping: Acid Resist Strip, Solvent Resist Strip

Cleaning: Pre-diffusion, Pre-Epi, Pre-photo, Photomask Clean, Wafer Reclaim, Post-Saw Clean and Pre-Panel Build Clean

MEI has extensive experience in creating equipment to handle most acids, solvents and chemicals in ultra-clean, ultra-pure environments.  We offer an array of material choices including: FM4910 (Halar, CPVC, PVDF), Polypropylene or Stainless Steel.

Tailored Design and Integration of Wet Process Equipment

MEI’s wet benches, wet processing systems, batch immersion systems, chemical delivery systems and chemical handling equipment are fully customizable based upon the specific intended use and footprint constraints of your fab. We collaborate on design through our design partnership process. All of our wet process systems are designed to be used with our chemical delivery systems, and integrated chemical delivery and wet process systems can be controlled with a common controller using MEI’s IDX Automation Software.

MEI also manufactures a host of fab support equipment, from storage cabinets and containers to catwalks, work station kiosks and cleanroom hoists and ergonomic swing arm mounts and cleanroom lifts. If your cleanroom has a support equipment need, MEI can design and manufacture a solution.

 

 
Wet Processing
Home | About Us | News | Contact Us
© 2009 MEI, LLC. | Albany, Oregon