Wet Processing Systems
Tailored Wet Processing Systems, Wet Stations, Wet Benches and
Fume Hoods
Semiconductor Processing Equipment
MEI’s batch wet process systems, wet stations and wet
benches are designed for silicon etch, wafer cleaning, and wafer
stripping for wafers from 100 mm up to 300 mm, and include fully
automatic, semi-automatic and manual options, with a choice of
linear and rotary robotics. MEI has a solution to meet most wet
etching, wet process, parts cleaning and wafer cleaning needs.
All of MEI’s wet benches and wet processing
equipment are:
Flexible and Upgradeable
Modular designs, professionally CAD drawn.
Easy to Use and Well Controlled
MEI IDX Automation
software provides easy to use, flexible and configurable
controls. MEI designs and manufactures all of its
own robotics.
Tailored
All systems are
tailored from one of our flexible platforms to your process and
fab design, via MEI’s unique
partnership design process.
Production Ready
Quality and safety are designed and built right
in. We focus on equipment footprint, high throughput and low
cost of ownership to meet your process needs. Software is SECS/GEM
compliant to provide seamless fab integration.
Designed for Safety
Proprietary MEI design elements ensure safety,
proper ergonomics, ease of maintenance, and high reliability.
Maintenance Friendly
Up-time is everything. Thoughtful design
provides easy access to all component areas, and MEI uses OEM, not
custom components so spares and replacements are readily obtainable.
Reliable
Field proven reliability developed
over twenty plus years of experience. Each MEI system is tailored and designed using Solid Works
with detailed drawings that ensure quality, precision and accurate
documentation.
Supported
MEI provides world-class, award winning
service, installation and support.
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MEI’s Wet Processing Systems
A full line of tools to meet your needs
MEI’s wet processing systems
provide you with affordable, high-quality semiconductor
and batch immersion process tools that perform safely
and reliably. Explore our modular systems by platform:
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Evolution
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Revolution
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Automated
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Multi-step
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In-line
transfer
mechanism
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Solar option
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Automated
o
Multi-step
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Rotary
transfer
mechanism
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Advancer
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Achiever
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Semi-Automated
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Single-step
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Modular-Linear
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Small
footprint
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Manual stations
and wet benches
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Fume Hoods and
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Parts Cleaning
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Each system is designed and
tailored to meet your process needs.
MEI wet benches and wet processing systems are
installed in major semiconductor, medical and solar fabs across the
industry, worldwide.
Call us:
1-877-858-3270
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Solar Wafer Processing, Medical Device Production, Parts Cleaning
and Other Applications
In addition to semiconductor wafer processing,
we build custom wet process systems for use in medical parts and
devices cleaning, MEMS, BioPharma production, life sciences
research, solar cell production, parts cleaning and other
application industries. Solar applications can include glass etch
and damage removal etch.
 Sample Process Applications:
Etching:
Oxide, Nitride, Silicon Etch
Stripping:
Acid Resist Strip, Solvent Resist Strip
Cleaning:
Pre-diffusion, Pre-Epi, Pre-photo, Photomask Clean, Wafer
Reclaim,
Post-Saw Clean and Pre-Panel Build Clean
MEI has extensive experience in creating
equipment to handle most acids, solvents and chemicals in
ultra-clean, ultra-pure environments. We offer an array of material
choices including: FM4910 (Halar, CPVC, PVDF),
Polypropylene or Stainless Steel.
Tailored Design and
Integration of Wet Process Equipment
MEI’s
wet
benches,
wet processing
systems,
batch immersion
systems,
chemical delivery
systems and chemical handling
equipment are fully customizable based upon the specific
intended use and footprint constraints of your fab. We collaborate
on design through our
design partnership process. All of our wet process systems are designed to
be used with our chemical
delivery systems, and
integrated chemical delivery and wet process systems can be
controlled with a common controller using MEI’s
IDX Automation Software.
MEI also manufactures a host of fab support
equipment, from storage cabinets
and containers to catwalks,
work
station kiosks and cleanroom hoists and
ergonomic swing arm mounts and cleanroom lifts. If your cleanroom has a support equipment need,
MEI can design and manufacture a solution.
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