Wet Processing Equipment
Top Quality Processing Equipment for Semiconductor,
MEMs, Solar, Medical Device Fabrication and Microtechnology Industries
MEI manufactures a wide array of cleanroom equipment and tools,
from wet processing solutions, and solar wafer cleaning equipment to
cleanroom accessories and custom process baths. We design and
manufacture our equipment with safety, maintainability and production in
mind. All equipment is tailored from one of our proven product
platforms, and is designed in SolidWorks®
, through our
design partnership process. All of
our wet process systems are designed to be used with our chemical delivery
systems, and both wet process systems and integrated chemical
delivery systems
can be controlled with a common controller using MEI’s
IDX Automation Software.
MEI’s batch wet process systems, wet
stations and
wet benches are designed for silicon etch, wafer cleaning, and wafer
stripping for wafers from 100 mm up to 300 mm, and include fully automatic,
semi-automatic and manual options, with a choice of linear and rotary
robotics. MEI has a solution to meet most wet etching, wet process, parts
cleaning and wafer cleaning needs.
MEI’s manual laminar fume
hoods
and
parts cleaning benches are built to last. Durable, high quality construction and
attention to design and detail contribute to usability and longevity.
Configurability, up-time, yield, maintainability and throughput are the
hallmarks of an MEI product. In addition, MEI
reconditions, retrofits, upgrades and repairs most makes of wet process systems, and some SRDs.
MEI also manufactures a host of fab support equipment, from
storage cabinets and containers to catwalks,
work station kiosks, cleanroom hoists and
ergonomic swing arm mounts. If your
cleanroom has a support equipment need, MEI can design and manufacture a
solution.
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