Spin Rinse Dryer (SRD) for High and Low Profile Cassettes

Designed and built by MEI, the Compass line of Spin Rinse Dryers offer the most advanced features found in today’s SRD. For high and low profile cassettes,  the Compass SRD is designed to reduce operating costs while meeting or exceeding all critical areas to include clean, dry and particle performance specifications. IDX Flexware provides advanced process control and can only be found on the Compass SRD from MEI. With greater reliability, performance, and low operating cost coupled with MEI’s award-winning support, the Compass Spin Rinse Dryer is the drying solution you can trust.

Spin Rinse Dryer, ClassOne, Wafer
Benchtop Single Stack Double Stack


  • Multiple wafer sizes for low and high profile cassettes
  • Rotor Type QD, 4 bolt, Verteq (1 rotor per chamber)
  • 10 Nozzle DI spray manifold
  • Programmable set point for N2 heater and temperature monitoring
  • St. Gobain pneumatic valve manifolds (off the shelf from any St. Gobain dist.)Rotor_3
  • DI supply connects directly to DI manifold resulting in no “dead lag” on the DI line.
  • Brushless DC motor with hi-res encoder for monitoring RPM and position control
  • Improved rotor RPM operating range: 0 – 2800 RPM’s
  • Vibration is controlled with Tunable Vibration Dampening.
  • Advanced Process Control with IDX Flexware software
  • 10.4” Color Touch-screen user interface
  • Data logging
  • Resistivity Monitoring with set-points
  • Humidity Monitoring with set-points
  • Insitu Anti-Stat management




  • Lower Operating Costs
  • Improved Performance
  • Advanced Process Control & Monitoring
  • Significant N2 Savings
  • Improved Particle Performance
  • Built with trusted, “off the shelf” components*
  • Intuitive Graphical User Interface

* excluding proprietary components



  • Host Communications & Factory Automation
  • USB Auto-backup
  • Light tower
  • Auto door
  • Humidity sensor
  • Chemical inject
  • Custom chamber designs
  • Custom carrier designs
  • DI Flow meter
  • DI & N2 facility boxes


Low Cost of Ownership

  • Designed to reduce facilities cost in all areas
  • Reduction in N2 usage
  • Reduction of DI water usage
  • Reduction in process cycle times, increased throughput
  • Built using readily available “Off-the Shelf” parts*

* Excluding proprietary components

The of annual amount of N2 saved by using the compass SRD is 3.2 million liters of N2 per chamber compared to the other competitors SRD.
Average Annual savings is about $2,000 per chamber depending on your price per liter of N2 gas

 Superior Static Control

  • Insitu Static management:
    • Program option to enable anti-static with door open to dissipate residual static charge while inserting or removing cassette

 Tunable Vibration Dampening Technology

  • Brushless DC motor with Hi-res encoder for monitoring RPM & Rotor position
  • Engineered rotors
  • Selected vibration dampeners
  • Proprietary process variables

 IDX Flexware – Advanced Process ControlSRD, SAT, SST, Batch Spray, Wafer, Semiconductor

MEI’s proprietary IDX Flexware Process Control Software is extremely flexible and ideal for applications that require a Spin Rinse Drying process. IDX is the process control solution for many different types of equipment where intuitive, sophisticated control and monitoring are required. IDX Flexware is outstanding for both process monitoring and productivity. IDX serves as a critical tool during maintenance and/or repair.





 Improve Performance, Yield & Lower Costs

MEI’s Advanced Process Controls provide the necessary stability of process conditions through closed loop monitoring/control using software recording of all key process variables. The result is a system capable of advanced cleaning and process monitoring capabilities required for critical process steps.


Downloads and Media


MEI Wet Processing Compass SRD Brochure
MEI Wet Processing Semitool SRD Refurbishment
MEI Wet Processing Semitool SRD Refurbishment with Controller Upgrade 
MEI Wet Processing SRD Rotor Service
MEI Wet Processing Semitool Magnum & Spectrums
MEI Wet Processing Compass SRD Spare Parts
MEI Wet Processing Semitool SRD Spare Parts