Solar Evolution: Solar Cell Photovoltaic
Manufacturing Equipment
MEI
Solar Evolution Optimized for Solar PV Wafer Clean and Etch
The MEI Solar Evolution high throughput wet processing systems
are in-line, configurable, automated, modular, linear batch immersion systems
made for high throughput at a low cost. They
are designed to handle photovoltaic/ solar wafers for many applications.
(photo shown is one implementation:
System layouts and features configurations vary)
Solar Applications
- Incoming Cell Clean
• Organic & particle removal to prep
surface for next process
- Post Saw Slurry Removal
• Coarse contaminant removal
- Saw Damage Removal
• Eliminate irregular surface & material
defects induced during ingot slices
- Damage Etch
• Create roughened surface to reduce light lost
from reflection
- Oxide Etch—Cell, Ingot, Chunk & Filament
• Remove contaminated
native oxide layer & reduce humidity for re-growth
Dry to Dry High Throughput, Process Multiple Lots and Recipes Simultaneously
For Solar wafer processing, the MEI Solar
Evolution provides higher throughput, because it is able to process multiple
lots and multiple recipes simultaneously, using the sophisticated process
controls of MEI’s proprietary IDX Automation
Software.
MEI Solar Evolution features
-
High throughput with multiple robots
-
200 wafer carrier cassettes
-
1200 wafers per hour
-
Extra wide tanks for multiple carriers
-
Input and output scales for wafer thinning metrics
-
Six inputs and outputs with automated staging
All of MEI’s Wet Benches, Wet Stations and Wet Processing
Equipment Are:
Flexible and Upgradeable
o
With modular designs, professionally engineered using
SolidWorks®
and model tested
using Cosmos® and Flow Works® softwareEasy to Use and Well Controlled
o
MEI IDX Automation
software running on an “off the shelf” standard PC host with
Windows XP® provides easy to use, flexible and configurable controlsTailored
o
Designed to spec from our flexible platforms to
your process and fab design, via
MEI’s unique partnership design processProduction Ready
o
Quality and safety are designed and built right in.
We focus on equipment
footprint,
high throughput & low cost of ownership to meet your process needs
o
Software is SECS /GEM compliant to provide seamless
fab integration
o
Designed to be SEMI S2 compliantDesigned for Safety
o
Proprietary MEI design elements ensure safety, proper
ergonomics, ease of
maintenance, and high reliabilityMaintenance Friendly
o
Up-time is everything. Thoughtful design provides easy
access to all component areas,
and uses OEM, not custom components
o
MEI robots are
custom designed and built in house for reliability, ease of maintenance
and
service
Reliable
o
Field proven reliability
o
Each MEI system is tailored and designed using Solid
Works® with detailed drawings that
ensure quality, precision and accurate
documentationSupported
o
MEI provides world-class, award winning
service
o
Revolution systems include pre-shipment qualification,
on-site installation and MEI’s
quality
support
o
Standard one year parts and labor warranty, two year optional warranty
o
Installation and start up included
Download our Evolution Wet
Processing System Brochure
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