Improve Performance, Yield & Lower Costs
MEI’s Advanced Process Controls provide the necessary stability of process conditions through closed loop monitoring/control using software recording of all key process variables. The result is a system capable of advanced cleaning and process monitoring capabilities required for critical process steps.
Built-In Concentration Controls & Monitoring
- Improve process performance
- Extend tank life
- Reduce chemical consumption
- Reduce chemical waste generated
- Reduce cost per pattern
DI Water Injection in Semi-Aqueous Solvents
- Improve process performance
- Reduce solvent usage
- Reduce solvent waste
- Improve uptime of tool
Flow Rate Monitoring
- Monitor recirculation flows
- Redundant temperature monitoring ensures critical temperature control
- Monitor spike volumes and confirmation of spike activity
Analog Controls
- Analog sensors provide software controlled ratio creation in-tank blending capabilities
- Control DI water inject
- Control temperature, recirculation flow, spiking volume
- Conductivity, resistivity, temperature and flow data are captured and stored
Download our MEI-IDX Automation Software Brochure