Download our IDX Flexware Process Control Software brochure

Intuitive Process Control for Semiconductor Wet Processing and Chemical Delivery Systems

 

 

Quality Controls, Touchscreen Interface, SECS/GEM Compliant

Many different OEM semiconductor wet processing equipment providers utilize IDX Control Software on their new semiconductor equipment sold within the industry. MEI’s IDX Flexware Process Control Software is widely regarded as an outstanding application for controlling automated wet processing systems. IDX  Flexware Process Control Software is able to streamline processes and provide unparalleled ease of use while maintaining uptime and reliability.

Improve Performance & Yield, Lower Costs with IDX Control Automation

MEI’s Advanced Process Controls provide the necessary stability of process conditions through closed loop monitoring/control using software recording for all key process variables. The result is a system capable of advanced cleaning and process monitoring capabilities required for critical process steps.

Designed for Productivity

  • Highly configurable operator interface
  • Unlimited user/permission levels with password protection
  • SECS/GEM compliant

Easy-to-Use, Touch Screen Interface

  • Easy-to-setup flexible recipe programmingI/O monitor program that displays all I/O statusRuns on standard PC using Windows software

Configurability and Versatility

  • Scheduler supports multiple robots
  • True multitasking operation
  • Interactive recipe and configuration editor

IDX Flexware, Automation Control Software,

MEI’s proprietary IDX Flexware Control Automation Software is extremely flexible and ideal for many different types of equipment where sophisticated user interface capabilities are required.IDX automation motion control software is outstanding for both process and maintenance productivity.

SECS/GEM Compatible

Improve Performance, Yield & Lower Costs

MEI’s Advanced Process Controls provide the necessary stability of process conditions through closed loop monitoring/control using software recording of all key process variables. The result is a system capable of advanced cleaning and process monitoring capabilities required for critical process steps.

Built-In Concentration Controls & Monitoring

  • Improve process performance
  • Extend tank life
  • Reduce chemical consumption
  • Reduce chemical waste generated
  • Reduce cost per pattern

DI Water Injection in Semi-Aqueous SolventsWet Bench Process Controls

  • Improve process performance
  • Reduce solvent usage
  • Reduce solvent waste
  • Improve uptime of tool

Flow Rate Monitoring

  • Monitor recirculation flows
  • Redundant temperature monitoring ensures critical temperature control
  • Monitor spike volumes and confirmation of spike activityWet Bench Data Output

Analog Controls

  • Analog sensors provide software controlled ratio creation in-tank blending capabilities
  • Control DI water inject
  • Control temperature, recirculation flow, spiking volume
  • Conductivity, resistivity, temperature and flow data are captured and stored

Download our IDX Flexware Control Software brochure

Designed for Productivity

IDX Flexware software features a scheduler that supports multiple robots (or other devices) and multiple cassettes, each of which can use a different processing recipe. A lot tracking and production reporting option is also available.

  • Scheduler handles multiple robots and cassettes with multiple recipes simultaneously
  • SECS /GEM compliant RS232 or HSMS driver
  • Lot tracking and production reporting
  • Data graphing with option that can be stored in a text file for import to spread sheet
  • Compatible with barcode readers for lot ID or recipe selection
  • Advanced process controls
  • Remote access compatible
  • Simple error recovery via resume “button”

Easy-to-Use, Color Touch Screen

  • Intuitive graphical display
  • Highly configurable operator interface runs on Windows XP R or 2000 operating systems
  • Interactive recipe and configuration editor for process customization
  • Unlimited user/permission levels with password protection (authorization levels highly configurable)

Designed for Safety & Reliability

  • Proven use in hundreds of applications across many industries and manufacturers
  • Software monitors for unsafe conditions
  • Human safety, product safety and equipment safety are protected with software and hardware interlocks
  • Watchdog program starts all scripts and keeps them running
  • Visual and audible alarms

Versatile

IDX Flexware Process Control  software is used in many applications in many industries. Applications can include:

  • Wet process systems used for cleaning, stripping and etching silicon wafers, solar PV wafers, MEMS wafers, and medical parts.
  • Bulk chemical distribution systems
  • Used semiconductor equipment system retrofits and system upgrades including Akrion, Verteq, Submicron Systems, Universal Plastics, Universal Systems, Bold, Chemical Safety Technology, Ultrafab, Amerimade, BPS, ChemWest and SantaClara Plastics systems.
  • Can be used with many different I/O platforms (GE, Siemens, Modicon, Omron and others)

Configurable & Flexible Software

  • Script written in C++ language that controls all devices and can be easily configured
  • Each device is controlled by a script and each script runs as a separate task
  • Open system architecture that can be extended by mapping in additional DLLs to the script language
  • Applications are constructed using a configurable operator interface and scripting language or by linking custom applications to its Dynamic Link Libraries (DLLs)
  • System architecture is open and easily extended by mapping in additional DLLs to the script language
  • Built-in drawing editor for screen editing for easier customization
  • Upgrades/changes at reasonable costs

Maintenance Operation

  • Robot can be manually controlled from operator interface
  • Complete data logging stored in a daily log file
  • Tank I/O (values/pumps/drains etc.) can be controlled individually from tank screen
  • Comes with I/O monitor program that displays all I/O status and can be used to monitor inputs and force outputs
  • Real-time task monitoring/viewing for identified problem and status