TruEtch process tanks provide Critical Etch solutions

Features:TruEtch2Consistent Silicon Etch

  •  Greater Stability
  •  Field Proven Reliability
  •  Higher Uptime
  •  Reduction in Chemical Consumption
  •  Reduction in Waste Treatment
  •  Lower Exhaust Requirements
  •  Smaller Footprint
  •  Advanced Software Capabilities
  •  Award Winning Service and Support

Reduce the Utilization of your Dry Tool

InGaP, GaAs Etch  more…

Cu and TiW Etch more

Gold Pattern Etch  more…

PolySi Etch   more…

Advanced Solutions – Etch Control Through Advanced Hardware,
Process Understanding & Software Execution

 MEI Platform Advantages Advanced Silicon Etch

Multi Lot Simultaneous Processing

  • High Performance, Shared Control System,
  • Shared Facilities, Smaller Footprint

Software Flexibility

  • User Programmable Configuration
  • Recipes, Speeds, Chem Control


  • Rapid Transfer from Etch to Rinse
  • Agitation Flexibility


  • Field Proven Designs