Automated Chunk Polysilicon Cleaning
Remove Organic Contamination of PolySi Chunks, Clean Oxide Growth, Eliminate Metal Contamination of Silicon Chunks
The MEI Polysilicon chunk cleaning system is ideal for removal of organic and metallic contamination found on Si ingot chunks after crushing polysilicon rods or Si-ingots in the polysilicon manufacturing process. Cleaning or etching poly chunks or UMG requires a high throughput wet etch system with good process control and outstanding drying capabilities to achieve optimal purity. MEI’s automated system for chunk polysilicon cleaning removes silicon-chunk surface contaminants and offers exceptional drying capability with vacuum drying in an inert environment. MEI’s solution for Poly Silicon chunk etching, cleaning and drying has significant advantages inherent in the carefully thought out design that considers not only operation, but resource use, safety, maintainability, control and flexibility.
Cleaning Polysilicon Chunks Made Efficient
- High Throughput
The MEI PolySiClean is a high throughput batch processing system. Polysilicon chunks are loaded into 20kg baskets for rapid (6 min cycle time) processing., providing contamination free chunks at 200 Kg/Hr. Input and output modules for the Poly Silicon chunk cleaning are expandable for any throughput requirements.
- Outstanding Process Control
Touch screen interface, flexible tank parameter and recipe editors and the option of using multiple robots for higher throughput are made possible by using MEI proprietary IDX Automation Software. IDX Automation Software provides superior process control capabilities along with the highest degree of maintenance flexibility compared with a PLC control based system.
- Efficient
MEI’s PolySiClean recycles DI water through each rinse tank MEI’s unique exhaust systems reduce exhaust requirements and allow for both top or rear connections.
- Safe
Safe Decontamination of Polysilicon chips or chunks. MEI controls the exothermic reaction of the HNA tanks while keeping throughput high.
Poly Silicon Chunk Etching, Cleaning & Drying
All of MEI’s Solar PV Manufacturing Equipment Is:
Flexible and Upgradeable
o
With modular designs, professionally engineered using
SolidWorks®
and model tested
using Cosmos® and Flow Works® softwareEasy to Use and Well Controlled
o
MEI IDX Automation
software running on an “off the shelf” standard PC host with
Windows XP® provides easy to use, flexible and configurable controlsTailored
o
Designed to spec from our flexible platforms to
your process and fab design, via
MEI’s unique partnership design processProduction Ready
o
Quality and safety are designed and built right in.
We focus on equipment
footprint,
high throughput & low cost of ownership to meet your process needs
o
Software is SECS /GEM compliant to provide seamless
fab integration
o
Designed to be SEMI S2 compliantDesigned for Safety
o
Proprietary MEI design elements ensure safety, proper
ergonomics, ease of
maintenance, and high reliabilityMaintenance Friendly
o
Up-time is everything. Thoughtful design provides easy
access to all component areas,
and uses OEM, not custom components
o
MEI robots are
custom designed and built in house for reliability, ease of maintenance
and
service
Reliable
o
Field proven reliability
o
Each MEI system is tailored and designed using Solid
Works® with detailed drawings that
ensure quality, precision and accurate
documentationSupported
o
MEI provides world-class, award winning
service
o
Revolution systems include pre-shipment qualification,
on-site installation and MEI’s
quality
support
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Standard one year parts and labor warranty, two year optional warranty
o
Installation and start up included
Download our Evolution Wet
Processing System Brochure
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