
MEI LLC
Announces new ‘Revolution’ Automated Multi-step Wet Processing System
Albany, OR. June 30, 2008
– MEI LLC announced the
introduction of its newest in a line of precision batch wet processing systems-
the “Revolution” Automated Multi-step Wet Processing System today at Semicon
West.
MEI’s “Revolution” Automated
Multi-step Wet Processing system combines ease of process control with a rotary
robot design and precision engineering to create a powerful, flexible tool with
a minimal fab footprint. The easily managed IDX automation software provides
outstanding control and programmability, and the new rotary design and robotics
handle carriers of 300mm wafers through multiple process steps in a very small
footprint.
The “Revolution” wet process
system can be built of Halar, Stainless, PVDF, or conventional materials and is
SEMI S2 and FM4910 compliant. Configurability, up-time, yield and throughput
are hallmarks of MEI’s wet process systems. The “Revolution” is an addition to
MEI”s very successful lines of Automated, Semi-automated and manual batch wet
process systems.
About MEI LLC
MEI is a diversified manufacturing and service company serving
the semiconductor and high technology industries. The company’s specialties
include wet process systems and services; robotics automation software; process
tool rigging and crating services; clean room safety, ergonomic and support
equipment; as well as a variety of manufacturing services, including machine,
metal and plastic fabrication and powder coating. MEI was founded in 1990 and
currently employs more than 100 people. For more information about MEI, visit
www.meillc.com.
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