DATA:  Evolution Wet Processing System BrochureSemiconductor Wet Processing Full-Auto


 APPLICATIONS: Semiconductor, GaAs, solar cell, IC, Medical and MEMS


Evolution Wet Processing System

High Throughput, Modular, Dry to Dry, Multiple Lots, Multiple Recipes & Advanced Scheduler

The Evolution Wet Processing System is a Full-Auto Linear Wet Bench. It’s designed to be highly configurable, fully-automated, and modular. As a batch immersion wet process system, the Evolution is made for high throughput at the lowest cost. They are designed for dry in and dry out with multiple lot batch processing capabilities  for wafer sizes 100mm to 300mm, within it’s own Class 1 Environment. Running under IDX Flexware control, the Evolution is one of the most advanced wet processing systems on the market. With multiple advanced features and capabilities, to include multi-step processing, specialized process tanks, Ultrasonic and Megasonic tanks, cascade or quick dump rinsing, chemical injection and spiking, Genesis X marangoni drying, robust, reliable robot transfer and SECS/GEM compliant host capabilities. The Evolution is custom tailored to meet your specific process needs.


Highly configurable Modular Design

 

Full-auto, wet bench, semiconductor, wafer, wet processing, BeoL

MEI’s Evolution Full-Auto Wet Bench provides a complete Dry-to-Dry solution, suitable for a wide variety of cleaning, etching and stripping applications, including all substrate types used in semiconductor, GaAs, solar cell, IC, Medical, MEMS and III-V compound device manufacturing as well as parts cleaning applications. The Evolution provides Customer-Spec configurations, high-performance throughput,  excellent up-time, and award-winning support. Being “Built on Commitment”  is the hallmark of every MEI wet processing system.

Full-auto, wet bench, semiconductor, wafer, wet processing, FEoL

For production lines with multiple process steps and complex process sequences, the MEI Evolution Wet-Processing systems is a very space and cost-effective solution. The MEI Evolution provides a higher throughput, because it is capable to process multiple lots and multiple recipes simultaneously with MEI’s proprietary “Scheduler” application within IDX Flexware. The Evolution is ideal for processes with hot phosphoric baths and other “lidded” process tanks, as it allows for gravity spiking of multiple chemistry, and provides a fully enclosed environment with HEPA filtration.


MEI’s IDX Flexware Process control provides the necessary stability and control of all process conditions through closed loop monitoring/control while logging all key process variables. The result is a reliable, repeatable system capable of advanced processes monitoring capabilities required for critical process steps.

 

IDX Flexware, Automation Control Software

 

IDX Flexware, Control Software, Wet Processing

IDX Flexware – Main Operator Screen

 

 


Evolution Automated Wet Processing System Options:

  • 150mm, 200mm wafers
  • SMIF and “open cassette” input options
  • Class 1 Environment
  • Ballroom and Bulkhead mounting
  • Heater, chiller, dryer options
  • Spiking, reclaim, lid, overflow weir, re-circulation,
  • Filter, fill method, agitation, flush and drain options
  • Megasonic or ultrasonic baths
  • Chemical spiking, re-circulation and filtration
  • Heater (including solid state), chiller and dryer options
  • Wafer carrier and queue pass-on cassette options
  • HEPA filters to create a positive pressure environment
  • SECS/GEM Interface Options
  • Automatic bulk chemical system integration
  • Integrated chemical spiking
  • Automatic or manual doors
  • Choice of materials, FM4910 (Halar, CPVC, PVDF) or polypropylene or stainless steel
  • SEMI S2-0703 3rd party evaluation audits and FM certified systems
  • UL Listed 508A Panel Shop

 All of MEI’s platforms are – 

  • Flexible and Upgradeable
  • Easy to Use and Well Controlled
  • Tailored
  • Production Ready
  • Designed for Safety
  • Maintenance Friendly
  • Reliable
  • Supported
  • More about our Features & Benefits and Design Process

 


Evolution Image Gallery


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