Advancer Gemini Wet Processing System

DATA: Advancer Wet Processing System BrochureSemiconductor Wet Processing Full-Auto


APPLICATIONS: Semiconductor, GaAs, solar cell, IC, Medical and MEMS


Wet Bench, Wet process, Semiconductor, Robot, Solution, Wet Processing System

One System – Dual Processes

The Advancer Gemini is a dual process, dual robot Wet Processing System, it is one of the most cost efficient platforms for multi-step processes available. The Advancer Gemini provides tremendous processing capacity within a reduced footprint for relatively low cost. Fewer facility connections and requirements make the Advancer Gemini an attractive system. MEI’s Advancer Gemini platform feature all the same advanced features and capabilities of the original Advancer wet bench but produce more throughput per square foot. The Advancer Gemini wet bench can also be better configured for sequential process steps within a single module.

Unique Advantages:

  • Dual process tanks per module
  • Shared facilities
  • Shared electronics
  • Single control PC driven I/O system

Features:

  • Single or dual processing capability
  • All standard semiconductor processes available
  • 6 and 8 inch processing with no changes
  • Modular design for ease of future expansion.IDX Flexware, Automation Control Software,
  • Easy to access plumbing and pneumatics
  • UL508A, NEC, and NFPA79 electrical standards
  • Side mount robot, easily slides out for service
  • Optional chemical spiking capability
  • IDX Flexware Process Control Software
  • Intuitive Touchscreen interface
  • Configurable User/Password Access
  • SECS/GEM compliant

Options:

  • Many tank and process bath options, including Megasonics and Ultrasonics
  • Heater, chiller, dryer options
  • Spiking, reclaim, lid, overflow weir, recirculation, filter, fill method, agitation, flush and drain options.
  • Wafer carrier and queue pass-on cassette options
  • HEPA or ULPA filters
  • SECS/GEM interface options
  • Bulk chemical supply
  • Integrated chemical spiking
  • Automatic or manual doors
  • Choice of materials, FM4910 (Halar, CPVC, PVDF) or polypropylene or stainless steel
  • SEMI S2-0703 3rd party evaluation audits and FM certified systems

 


 


IDX Flexware Advanced Process Control

MEI’s IDX Flexware Advanced Process control provide the necessary stability of process conditions through closed loop monitoring/control using software recording for all key process variables in your wet process steps. The result is a system capable of advanced cleaning and process monitoring capabilities required for critical process steps.

IDX Flexware, Wet Bench, Wet Processing

Advancer Gemini – Main Operator Screen


MEI systems are Built on Commitment

  • Flexible and Upgradeable
  • Easy to Use and Well Controlled
  • Tailored
  • Production Ready
  • Designed for Safety
  • Maintenance Friendly
  • Reliable
  • Supported
  • More about our Wet Bench Features & Benefits and Design Process

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