Advancer Classic Wet Processing System

DATA:  Advancer Wet Processing System BrochureSemiconductor, Wet Processing, Wet Bench


 APPLICATIONS: Semiconductor, GaAs, solar cell, IC, Medical and MEMS


 

Wet Bench, Wet Processing, Semiconductor

Proven Reliability, Advanced Control

MEI’s Advancer platform of wet benches offer flexible configurations that provide effective solutions to many wet processing solutions.  The Advancer is available as full-auto or semi-auto, stand-alone or modular. The system is suitable for a wide variety of etch, strip and clean applications for semiconductor processing. Applications include wet processing for IC devices, medical device, MEMS, LED and III-V Compounds. The Advancer wet bench offers many features to optimize the process chemical requirements such as bulk chemical calls and status, chemical spiking, and “in-tank” blending of chemistries monitored by IDX Flexware. With an extremely small footprint, the MEI Advancer Wet Bench provides wet processing solutions for fabs with limited production space. The Advancer wet bench is a field-proven platform providing reliability, configurability, increased up-time and yield. All are the hallmarks of an MEI wet processing system. Solutions that are Built on Commitment

NEW!  Dry In Dry out processing with the Genesis Marangoni Dryer

 

Highly Configurable, Modular Designed Wet Bench

With up to four modules utilizing one robot per wet station module. The host computer drives all robots independently, enabling any combination of simultaneous or asynchronous processing in each module of varying recipes. This multiple recipe multiple lot processing is made possible by using MEI proprietary IDX Flexware Process Control Software. IDX Flexware provides superior process control capabilities for your semiconductor wet processing along with the highest degree of maintenance flexibility compared with a PLC control based system. The Advancer wet processing robots are located outside of the process area and are not exposed to chemical fumes, resulting in higher reliability, ease of maintenance and lower overall expense over the life of the wet bench.

 Features:

  • Single or dual cassette capability
  • All standard semiconductor processes available
  • 6 and 8 inch processing with no changes
  • Modular design for ease of future expansion.
  • Easy to access plumbing, pneumatics and electrical components
  • Single process and rinse design
  • Side mount robot, easily slides out for service
  • Optional chemical spiking capability
  • Flexware Process Control Software
  • Available in all common process configurations
  • Easily upgradeable with high reliability

Options:

  • Many tank and process bath options, including Megasonics and Ultrasonics
  • Heater, chiller, dryer options
  • Spiking, reclaim, lid, overflow weir, recirculation
  • Filter, fill method, agitation, flush and drain options.
  • Wafer carrier and queue pass-on cassette options
  • HEPA or ULPA filters
  • SECS/GEM interface options
  • Bulk chemical supply
  • Integrated chemical spiking
  • Automatic or manual doors
  • Choice of materials, FM4910 (Halar, CPVC, PVDF) or
    polypropylene or stainless steel
  • SEMI S2-0703 3rd party evaluation audits and FM certified systems
  • UL Listed 508A Main Electrical Panel

 


IDX Flexware: Advanced Process Controls for Wet Processing

MEI’s IDX Flexware Process Control software provides the necessary stability of process conditions through closed loop monitoring/control using software recording for all key process variables in your wet process steps. The result is a system capable of advanced cleaning and process monitoring capabilities required for critical process steps.

IDX Flexware Process Control Software, SECS/GEM, Semiconductor

IDX Flexware – Main Operator Screen


MEI’s Wet Benches Are:

  • Flexible and Upgradeable
  • Easy to Use and Well Controlled
  • Tailored
  • Production Ready
  • Designed for Safety
  • Maintenance Friendly
  • Reliable
  • Supported
  • More about our Wet Bench Features & Benefits and Design Process


Additional Advancer Wet Benches:

 

Featuring the Advancer Wet Processing system

 


 

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