Used Semiconductor Equipment
Reconditioning, Upgrades,
Refurbishment & Repairs
Extend the Life of your
Wet Process Systems, SRDs & Chemical Delivery Systems
 MEI
can extend the usable life of your wet processing equipment, from wet systems
and dryers, to processes and plumbing. Our wet process system retrofits,
reconditioning and upgrade work includes manual wet benches, and semi-automated
or fully automated processing equipment, SRDs and chemical delivery systems.
Reasons to Recondition
Used Semiconductor Equipment & Support System Retrofits
MEI’s high quality, custom work upgrading used semiconductor
equipment can include:
- Repair - with replacement or retrofitted parts
- Refurbish and Recondition - with existing design and function, but restoring
to good working order
- Retrofits - changing robots, baths, software, etc.
Retrofit Unsupported Equipment
Save money and keep your system in use by
retrofitting, refurbishing, reconditioning or upgrading it with MEI’s custom
capabilities.
- Replace failing parts
- Replace obsolete components
- Upgrade equipment and
material
- Completely redesign a system
within the confines of it’s current shell and footprint
- Upgrades and Overhauls - to add new or improved features
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MEI Upgrades and Repairs the
Following Brands:
- Akrion/SMS
- Amerimade
- Bold
- BPS
- SCP
- SEZ
- Chemical Safety Technology
- Semitool (STI)
- UltraFab
- Universal Plastics
- Universal Systems
- Verteq
- Others
And Spin/Rinse Dryers:
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-
 Upgrade from manual to
semi-automatic
- Upgrade, rebuild or refurbish
robots and robotic controllers to improve process control and usability
-
Install new controls with IDX
Automation Software
- Upgrade operator process
interface, making it easier for operators to learn and use
- Providing better process
monitoring and control
- Providing easier access and
maintenance of the tool
- Add control systems—PLC and
cell controllers
- New robots with off-the-shelf
parts
 We have worked extensively with tool operators,
maintenance technicians and safety/ergonomic engineers to develop what we feel
are best-in-class ergonomic solutions.
- New loading systems allow
operators to move product in and out of the equipment more ergonomically
- Ergonomic screens with swing
arm positioning and touch screen controls create a more accommodating
user interface
- Increase wafer size up to 300 mm
-
 Refurbish or replace chemical
tanks and baths
- Modify process layout of
chemical and rinse tanks
-
Change materials to quartz,
PTFE, Halar and Teflon
- Upgrade controls, plumbing
and electronics
- Integrate megasonics,
ultrasonics, nitrogen or mechanical agitation
- Upgrade to FM4910 enclosures
- Add MEI IDX Automation
Software for process control
- Upgrade level sensors
- Add scales to include mixing
capability
- Add chemical spiking and/or
concentration monitoring and control
- Convert from manual fill to
bulk fill
MEI is a UL certified panel
manufacturer.
- Alterations to meet new
standards or codes
- Add in-line heaters and heat
exchangers
- Include heater/chillers,
enclosures, pumps and compressor, and probes, sensors and switches
- Add temperature control,
including heater circuit control and safety circuits
 Ventilation and Safety Upgrades
- Exhaust collars
- Exhaust rerouting and monitor
- Fire suppression upgrade
- Tank lids, fume control and
enclosures
- Condensing systems
Warranty Option
Most MEI reconditioning work is performed with a
1-year warranty. Multi year warranties are available as options on some types of
system upgrades and retrofits.
Fully Supported:
- Full start-up, testing, and
training available
- MEI’s technical services
ensure the best possible operation and process results from wet process
improvements.
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