Chemical Delivery Systems Brochure  Semiconductor Wet Processing Full-Auto

Flexible, Remote Chemical Delivery

Scalable to suit your chemical delivery needs

FlexChem is a wet bench bulk delivery system designed for incremental expansion to accommodate a production line’s changing needs. This flexible system eliminates manual chemical pours, the hassles associated with bottles, and provides all the benefits of a drum system.  It is designed for chemical containment room applications. MEI’s tailored FlexChem system will have the features you need today in a package that can be easily upgraded for future chemical delivery needs.


FlexChem Features:

Flexible, Easily Expanded Bulk Chemical Delivery Systems

  • Chemical room compatible delivery system, easy to install
  • Scalable to fit future needs with minimal incremental cost
  • Easy to maintain as well as adapt to your specific needs
  • Modules and console stack to minimize footprint, and provide ergonomic access to controls
  • Assemblies designed for maximum flexibility and expandability

Small Footprint in a Modular Design

  • FlexChem controller provides a complete control solution in a small package
  • Standardization in incremental limits will allow for maximum chemical delivery capacity
  • Modules and console stack to minimize footprint and provide ergonomic controls


  • MEI will create chemical delivery systems to fit your chemical process needs and production floor design via our partnership design process
  • Optional chemical filtration recirculation
  • Pump options to fit your existing spares stock
  • Multiple system “kiosk” remote control interface provides E-Stop capabilities as well as status notification.
  • Pressurized systems with programmable mixture control

Production Ready

  • Quality, ergonomics and safety are designed into every system
  • Easy to navigate touch screen controls
  • Graphical touch screen controls on computers running Microsoft Windows XP® and MEI IDX Automation software
  • Space efficient; MEI’s space saving cabinets fit easily into tight work spaces
  • Valve manifold boxes are available from 3-12 sticks to maximize delivery capability
  • Control systems seamlessly integrate with all MEI Wet Process Process Systems and all other vendor’s wet processing systems utilizing dry contact ready/request signals

Designed for Safety

  • Conforms to SEMI S2 standard
  • MEI is a UL certified panel manufacturer
  • Internal spill and leak detection for all chemical handling compartments
    (facilities, pumps and drum)
  • Local and remote EMO shut down with low voltage circuit
  • Exhaust differential pressure monitoring
  • Visual alarm light tower with integrated audible alarm
  • Electronics housed in separate N2 purged compartment
  • Choice of materials, FM4910 (Halar, CPVC, PVDF) or polypropylene or stainless steel.

Maintenance Friendly

  • Easily removable access panels provide front and side access to internal components
  • Easy to access pumps and valves allow for excellent MTTR, improving uptime


  • Field proven designs and safety features
  • Highest quality plumbing components
  • All metal components are either chemical resistance epoxy powder coated or anodized for longevity
  • Optimal nitrogen purged electronics compartments


  • MEI provides award winning service, installation and support
  • Installation included
  • Operations manual and complete design documentation provided