Semitool Batch Spray Solvent Tool (SST) UpgradesSemiitool SST Upgrade with MEI IDX

MEI provides exceptionally refurbished Semitool Wet Process Equipment including , Spray Solvent Tools (SST), and Spin Rinse Dryers (SRD).  We focus on making your SST work longer and serve you better with Repair, Upgrades, Service and Support.

Our trained engineers and technicians will design an upgrade and retrofit to meet your needs, with a full range of Batch spray upgrade options.

SST Upgrade Applications

  • Resist strip
  • Polymer removal clean
  • Poly etch clean, polymer removal BEOL
  • Resist developing, positive or negative photo-resist strip
  • Substrate and mask cleaning
  • Metal lift off, flux removal

SST Upgrade Features

Batch Spray Rotor Resurfacing

  • 25 wafer loads
  • Single and dual chamber
  • Trending and graphing via statistical process control software
  • High throughput
  • Fire protection
  • Automated dry in—dry out
  • Chemical reclaim
  • Repeatable process control
  • Easy to maintain

Easier Maintenance with Off the Shelf Parts for your Semitool  Spray Solvent Tool (SSTIDXfor Semitool SST retrofit)

MEI’s SST upgrade is exceptional in two key ways:

  1. Off the shelf parts  MEI will retrofit your Batch Spray tool with new valves and operating parts that are “off the shelf”, no more e-bay hunting to find replacement parts.
  2. Exceptional control with MEI’s IDX Flexware Process Control Software _MEI will retrofit any Semitool SST machine with our proprietary IDX Process control software, giving you unprecedented ability to  monitor and control your process, for better results, and more information.

IDX Flexware Process Control Software provides exceptional process control

Advanced Process ControlIDX logo B

  • Configurability
  • Modern control system
  • HW & software updates
  • Replace obsolete control systems
  • Windows operating system (replaces DOS)

 

Individual Upgrade Options

  • Control System Upgrade – Eliminates Semitool** obsolete electronics and replaces controls with modern off the shelf components. Gives you a software platform that is easy to configure and has unlimited capabilities like no other spray tool.
  • Front & Rear Monitor Upgrade* – Front and Rear Monitor upgrades: Lowest cost solution on the market to replace your old CRT and LCD monitors with 15 inch ELO® touchscreen monitors.

  • Analog Flow Meter Upgrade *The Vortex flow meter is low maintenance and gives you improved accuracy control over your process.

  • Valve Manifold UpgradeReplaces all Semitool** 3/8 valve manifolds with St Gobain® Valves. These valves are available world wide from any St Gobain® Distributer. Eliminates a single source supplier for spare valves.

  • Chamber UpgradeGives you the capability to run larger product without having to buy a new tool.

  • Drain Block UpgradeReplaces the Semitool** Drain Block with St Gobain® Valves. These valves available world wide from any St Gobain® Distributer. Eliminates a single source supplier for spare valves.

  • PFA Filter UpgradeProvides you filter housings that have Flaretek® Fittings and eliminates metal filter housings from you process chemical supply.

  • Closed-loop Control Pump Upgrade * – Upgrade your current pump with a closed-loop pump system that offers improved process control, improved uniformity and reduces scrapped events.

  • Pneumatic Trebor Pump Upgrade * – Upgrade your current pumps to all Teflon® Pneumatic Pumps from Trebor. For better flow control and exceptional performance.

  • Externally Heated Tank Upgrade * – Upgrade to heated tanks when changing process to chemicals that need to be heated.

  • Inline Heater Upgrade * – Faster recovery time when heated. Maintenance friendly design

  • Tank Addition Upgrade * – Add tanks to your tool to increase process capabilities.

Download MEI’s complete list of Batch Spray Upgrades

MEI Wet Processing

* IDX Control System Upgrade is required prior to this upgrade

** MEI is in no way affiliated with Semitool or their products

Onsite installation is available for many upgrades
MEI offers World Class System Support!

*Semitool is a registered trademarks of Applied materials. MEI Wet Processing Systems and Services is not affiliated with Applied Materials in any way, nor does Applied Materials endorse any product of MEI Wet Processing Systems and Services
*Semitool is a registered trademarks of Applied materials. MEI Wet Processing Systems and Services  is not affiliated with Applied Materials in any way, nor does Applied Materials endorse any product of MEI Wet Processing Systems and Services