Semitool Parts: Extend the Life of your Semitool Batch Spray Equipment!Rotor Replacment, Semitool, Spray Tool

Semitool parts, semitool rotors, and part replacements. MEI provides used parts for all Semitool Batch Spray equipment to include  Spray Acid Tools (SAT), Spray Solvent Tools (SST), and Spin Rinse Dryers (SRD). MEI Wet Process Systems and Services not only focuses on extending the life of your semiconductor manufacturing tool, MEI strives to improve your overall process and throughput. With MEI’s award-winning technical support and wet processing and drying expertise you can count  on MEI Wet Processing Systems & Services  to have what you need when you need it.

All used parts from MEI’s batch spray and SRD used parts inventory are inspected, decontaminated and tested in operational equipment.

 New/Used Parts: 

Electrical Parts

Mechanical Parts

Plumbing Parts


SST Spare Parts List