IDX Control Software for Wet Processing Equipment and Chemical Delivery Systems
MEI’s proprietary IDX Control Automation Software is
extremely flexible and ideal for many different types of equipment where
sophisticated user interface capabilities are required.
Many different OEM equipment providers utilize IDX Control Software
on their new equipment sold within the industry. MEI’s IDX
Automation Software is widely regarded as an outstanding application
for controlling automated wet processing systems. IDX is able to
streamline processes and provide unparalleled ease of use while
maintaining uptime and reliability.
IDX motion control software is shipped with all new
MEI Wet
Process Systems, most
MEI
Chemical Delivery Systems, and it can be used to upgrade most non-MEI wet
systems as well as standalone spin-rinse dryers. The operator’s touch screen
interface employs easy-to-setup flexible recipe programming, combined with
manual and semi-auto operational control of valves and I/O points so that operators
and maintenance technicians have the control they require right at their
fingertips. This makes IDX automation motion control software outstanding for
both process and maintenance productivity.
IDX Control Automation Software is available for purchase /
use under a license agreement.
IDX software features a scheduler that supports multiple
robots (or other devices) and multiple cassettes, each of which can use a
different processing recipe. A lot tracking and production reporting option is
also available.
Scheduler handles multiple robots and cassettes with
multiple recipes simultaneously
SECS /GEM compliant RS232 or HSMS driver
Lot tracking and production reporting
Data graphing with option that can be stored in a text file for import
to spread sheet
Compatible with barcode readers for lot ID or recipe selection
IDX Control Automation Software is used in many
applications in many industries. Applications can include:
Wet process systems used for cleaning, stripping and
etching silicon wafers, solar PV wafers, MEMS wafers, and medical parts.
Bulk chemical distribution systems
Used semiconductor equipment system retrofits and system
upgrades including Akrion, Verteq,
Submicron Systems, Universal Plastics, Universal Systems, Bold,
Chemical Safety Technology, Ultrafab,
Amerimade, BPS, ChemWest and SantaClara Plastics systems.
Can be used with many different I/O platforms (GE, Siemens, Modicon, Omron and others)
Script
written in C++ language that controls all devices and can
be easily configured
Each device is controlled by a script and each script runs as a separate
task
Open system architecture that can be extended by mapping in additional
DLLs to the script language
Applications are constructed using a configurable operator interface and
scripting language or by linking custom applications to its Dynamic Link Libraries
(DLLs)
System architecture is open and easily extended by mapping in additional
DLLs to the script language
Built-in drawing editor for screen editing for easier customization
Improve process performance
Scheduler handles multiple robots and cassettes with
multiple recipes simultaneously
Script
written in C++ language that controls all devices and can
be easily configured