» Automated Processing Benches

MEI process equipment configurations range from two tank semi-automated systems to multi-tank fully automated dry-to-dry tools. We currently manufacture in three system platforms:

• Two tank, front-to-back robot configuration
• Three and four tank rotary robot configuration
• Multi-tank linear robot configuration

Each of these system types can be leveraged to meet specific process needs as individually required. All of our systems contain the following features:

• Etch, Strip & Clean Systems up to 300mm Wafers
• Manual or Automated Systems - Single or Multi-Tanks
• Linear, Rotary and Front-To-Back Robotic System Options
• Upgradeable Modular Design
• High Level Performance w/Competitive Pricing
• SEMI S2 & FM Certified Systems
• UL Listed and Labeled Electrical Panels
• IDX Robotics Automation Software
• Wide Variety of Sizes and Options
• Reliable, Field Proven Robotics & Controls
• Exhaust Optimization using Flow Modeling Software
• Critical Process Control with System Feedback
• Complete In-House 3D Product Design - Full Engineering Support
• Systems Designed & Built By Industry Experts
• Use of Industry Standard OEM Components Wherever Possible
• All Parts are CNC Machined (Separate Plastic & Metal Machining)
• In-House Plastic & Metal Fabrication - Certified Welders
• In-House Ultra Pure Plumbing - Certified Purebond Welding
• Megasonic and Ultrasonic Cleaning Available
• Stand Alone or Robotic Agitation Available
• Systems Tested in MEI Clean Room using DI Water, Nitrogen & CDA.
• Iron-Man Tests Available
• MTBF >1000 hr for Manual Systems >750 hr for Automated Systems
• Uptime >97% for Manual Systems >95% for Automated Systems
• Standard 1-Year Parts and Labor Warranty.
• 2-Year Warranty Optional.
• Full Field Service Support and On-Site Warranty Coverage

ADVANCER Wet Processing System

• Basic Upgradeable Manual Systems up to Full Automation
• 3rd Party Inspected and Approved for SEMI-S2
• Designed for Easy Maintenance, Variable Processes, and Longevity
• Very Small Footprint Maximizes Fab Space (36” wide 2-Tank Modules for 150mm)
• GUI Single Point User Interface for Operation & Maintenance
• Optional Fully GEM Capable
• Optional Lot Data Capture
• Slide Out Robot - Complete Robot Replacement in 1/2-Hour
• Easy Plumbing & Pneumatics Access
• All OEM Components – No Custom Devices
• 100-300mm Wafers
• Single or Dual Cassettes, Side-by-Side or Back-to-Back Lots
• Large Easy to Use Touch Screen with MEI Adjustable Swingarm
• Intuitive Graphical Display with Operator and Maintenance Screens