Wet Processing Systems & Services
Serving Global Semiconductor, MEMS, LED, III-V Compound, and Medical Industries
MEI’s wet processing systems, wet benches, and chemical delivery systems provide you with reliable, high-quality solutions for almost every batch immersion or spray wet process application. MEI’s field-proven, high performance systems are custom tailored to your meet all processes requirements. With the many advanced features, available options and award-winning support MEI’s is your Wet Processing solution for all your applications. All MEI systems feature IDX Flexware Process Control software allowing you complete control, monitoring, and data aquisition of your entire application process. Depending on the platform MEI offers optional megasonic and ultrasonic process tanks, conductivity and resistivity monitoring, multi-axis robots, a variety of materials choices, exhaust flow modeling, ergonomics and safety features. We specialize in fully-automated wet processing solutions, providing Dry In /Dry Out processes with some of the smallest footprints available in the industry. Through our innovative technology, superior design, quality craftsmanship, and award-winning technical support MEI offers a commitment to their customer like no other manufacture in the industry.
We are Built on Commitment
- Evolution Full-Auto Wet Bench
- Advancer & Revolution Semi-Auto Wet Bench
- Compass Spin Rinse Dryer
- Chemical Delivery
- IDX Flexware Process Control Software
- Advanced Processing Tanks
- Integrated Drying Systems
- Metal Lift-Off
Superior performance with MEI’s patented FluidJet technology
- Etch, Strip & Clean
Consistent Uniformity with MEI’s field-proven TruEtch technology
- Drying – Integrated & Stand-alone
Full-auto, dry-to-dry systems that feature integrated drying tanks such GenesisX Marangoni dryer or the VaporDry dryer
Available in 3 different configurations, the Compass Spin Rinse Dryer provides advanced features like no other SRD in the industry.
Advancer – Immersion Single-step Processing Wet Bench
GEMINI, CLASSIC, and MICRO
Revolution – Immersion Multi-step Processing Wet Bench
MLO, CLASSIC, and DRY-to-DRY
Evolution – Immersion Full-Auto, High-throughput Wet Bench
BEoL and FEoL
Compass Spin Rinse Dryers
Benchtop, Single, and Dual
Designed and built by MEI’s Compass Spin Rinse Dryers are top-quality wafer dryers for high and low profile cassettes. The Compass SRD is designed to reduce operating costs while meeting or exceeding all critical areas to include clean, dry and particle performance specifications. This level of advanced process control can only be found on the Compass SRD. With greater reliability, performance, and low operating cost coupled with MEI’s award-winning support, the Compass Spin Rinse Dryer is the solution you can trust.
SST and SAT
MEI’s offers complete system refurbishments of Solvent and Acid Spray systems. With MEI’s proprietary IDX Flexware Control Software many new features and capabilities are made avaialble for you to take advantage of. MEI also offers many upgrades to improve your throughput and process control processes. MEI provides award-winning support and Rotor replacement services.
Chemical Delivery Units
DrumChem, FlexChem, and MultiChem
MEI’s Chemical Delivery Systems and Chemical Distribution Equipment are designed to seamlessly integrate with your automated and/or semi-auto wet processing systems either remotely or directly in the cleanroom environment. MEI’s space efficient bulk chemical delivery systems and point of use chemical blending solutions will reduce waste and lower overall operational costs by reducing labor cost and reducing scrap incidents over manual pour systems.
IDX Flexware Process Control Software
Advanced Monitoring & Control
Ultimate control of your wet process systems with IDX Flexware Process Control Software. IDX provides the ability to control and improve all digital and analog process conditions through a closed-loop monitoring system. With access to all process control parameters and variables, the result is solution that offers reliability, improved performance, advanced control, and higher yield.
All Full-Auto & Semi-Auto Wet Benches run on MEI’s proprietary IDX Flexware Control software
Located in the great northwest, MEI Wet Processing Systems and Services provides advanced wet processing solutions and equipment for many hi-tech industries including Semiconductor, Solar, MEMS, LED, Medical, and Chemical Delivery. MEI solutions are for those who have applications that demand reliable, repeatable results. MEI systems provide high-throughput while maintaining a low cost of ownership. MEI’s advanced Full-auto and Semi-auto wet bench systems deliver superior performance and features. MEI also provides system support for legacy equipment such as: Amerimade, Semitool, Akrion, Submicron, Verteq, and SCP. We provide complete IDX Flexware System Control Upgrades on many older, un-supported OEM systems. You can breath new-life back into your processing equipment.