Wet Processing Systems & Services

 Wet Process, Wet Bench, Semiconductor, Chemical, Automated, wafer


 Serving Global Semiconductor, MEMS, LED, III-V Compound, and Medical Industries

MEI’s wet processing systems, wet benches, and chemical delivery systems provide you with  reliable, high-quality solutions for almost every batch immersion or spray wet process application.  MEI’s field-proven, high performance systems are custom tailored to your meet all  processes requirements. With  the many advanced features, available options  and  award-winning support MEI’s  is your Wet Processing solution for all your applications. All MEI systems feature IDX Flexware Process Control software allowing you complete control, monitoring, and data aquisition of your entire application process.   Depending on the platform MEI offers optional  megasonic and ultrasonic process tanks, conductivity and resistivity monitoring, multi-axis robots, a variety of materials choices, exhaust flow modeling, ergonomics and safety features.  We specialize in fully-automated wet processing solutions, providing Dry In /Dry Out processes with some of the smallest footprints available in the industry. Through our innovative technology, superior design, quality craftsmanship, and award-winning technical support MEI offers a commitment to their customer like no other manufacture in the industry.
We are Built on Commitment



MEI Platforms, Technology, and Solutions


  • Evolution Full-Auto Wet Bench
  • Advancer & Revolution Semi-Auto Wet Bench
  • Compass Spin Rinse Dryer
  • Chemical Delivery



  • IDX Flexware Process Control Software
  • Advanced Processing Tanks
  • Integrated Drying Systems



  • Metal Lift-Off
    Superior performance with MEI’s patented FluidJet technology
  • Etch, Strip & Clean
    Consistent Uniformity with MEI’s  field-proven TruEtch technology
  • Drying – Integrated & Stand-alone
    Full-auto, dry-to-dry systems that feature integrated drying tanks such GenesisX Marangoni dryer or the VaporDry dryer
    Available in 3 different configurations, the Compass Spin Rinse Dryer provides advanced features like no other SRD in the industry.


Advancer – Immersion Single-step Processing Wet Bench



Wet Bench, Semiconductor, Wafer, Fab, Process, Solution










Wet Bench, Semiconductor, Wafer, Fab, Process, Solution






Revolution – Immersion Multi-step Processing Wet Bench




Wet Processing, Wet bench, Robot, MicroTech, Wafer,

Wet Processing, Wet bench, Robot, MicroTech, Wafer,




Evolution – Immersion Full-Auto, High-throughput Wet Bench

BEoL and FEoL

 Full-Auto, Dry to Dry, SMIF, Wafer, BEol, FEoL, Wet Bench

Wet bench, Full-Auto, SMIF, Wafer, Semiconductor, MEMS, Solar, Medical, Process, Solution




Compass Spin Rinse Dryers

Benchtop, Single, and Dual

Designed and built by MEI’s Compass Spin Rinse Dryers are top-quality wafer dryers for high and low profile cassettes. The Compass SRD is designed to reduce operating costs while meeting or exceeding all critical areas to include clean, dry and particle performance specifications. This level of advanced process control can only be found on the Compass SRD. With greater reliability, performance, and low operating cost coupled with MEI’s award-winning support, the Compass Spin Rinse Dryer is the solution you can trust.

Spin, Rinse, Dryer, Semitool, Verteq, SRD

















 SRD, Semitool, Verteq, Spin Rinse Dryer, Wafer, Rotor, Fab






MEI’s offers complete system refurbishments of Solvent and Acid Spray systems. With MEI’s proprietary IDX Flexware Control Software many new features and capabilities are made avaialble for you to take advantage of. MEI also offers many upgrades to improve your throughput and process control processes. MEI provides award-winning support and Rotor replacement services.


Semitool, SST, SAT, Spray, OEM Group, ClassOne, Ramgraber

Semitool, SST, SAT, Spray, OEM Group, ClassOne, Ramgraber

Chemical Delivery Units

DrumChem, FlexChem, and MultiChem

MEI’s Chemical Delivery Systems and Chemical Distribution Equipment are designed to seamlessly integrate with your automated and/or semi-auto wet processing systems either remotely or directly in the cleanroom environment.  MEI’s space efficient bulk chemical delivery systems and point of use chemical blending solutions will reduce waste and lower overall operational costs by reducing labor cost and reducing scrap incidents over manual pour systems.


Drum, Carboy, Chemical delivery, management, Bulk, delivery


Chemical, Textile, Bulk, Drum, Safety, Carboy




IDX Flexware Process Control Software

Advanced Monitoring & Control

Ultimate control of your wet process systems with IDX Flexware Process Control Software. IDX provides the ability to control and improve all digital and analog process conditions through a closed-loop monitoring system. With access to all process control parameters and variables, the result is solution that offers reliability, improved performance, advanced control, and higher yield.

All Full-Auto & Semi-Auto Wet Benches run on MEI’s proprietary IDX Flexware Control software

Located in the great northwest, MEI Wet Processing Systems and Services provides advanced wet processing solutions and equipment for many hi-tech industries including Semiconductor, Solar, MEMS, LED, Medical, and Chemical Delivery. MEI solutions are for those who have applications that demand reliable, repeatable results. MEI systems provide high-throughput while maintaining a low cost of ownership. MEI’s advanced Full-auto and Semi-auto wet bench systems deliver superior performance and features. MEI also provides system support for legacy equipment such as: Amerimade, Semitool, Akrion, Submicron, Verteq, and SCP. We provide complete IDX Flexware System Control Upgrades on many older, un-supported OEM systems. You can breath new-life back into your processing equipment.

 Process, Control, Software, Monitoring, System Control, GUI, HMI, Interface


MEI Wet Processing Systems & Services

MEI’s reputation is built upon our commitment to outstanding, award-winning customer service!

 We are Built on Commitment™